Molecular Dynamics Simulation of Low-Energy Sputtering of Molybdenum with Xenon Ions
نویسنده
چکیده
A study has been initiated to investigate interactions between low-energy xenon ions and molybdenum using molecular dynamics (MD) simulation. An MD code, Simulation Kit, designed for simulation of atomic collisions in solid lattices was used in this study. The ion energies ranged from 150 to 500 eV. The ions impinged on the target normal to the (110) plane. The target consisted of 6 layers, each nominally consisting of 306 atoms. The standard ZBL potential with a screening length correction factor of 1.1 has been used in this investigation. Each simulation was terminated after 1000 fs. The sputtering yields obtained from these simulations are in reasonable agreement with existing data.
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